A method for measuring a distance of a component to an object and for adjusting a position of a component in a particle beam device, computer program product, particle beam device and gas supply device

摘要

Method for determining a distance of at least one component (21, 26, 48, 52, 139), which is in a first starting position, of a particle beam device (1) from an object (4) which is in a second starting position, wherein the particle beam device ( 1) the object (4) is analyzed and / or processed and wherein the component (21, 26, 48, 52, 139) is designed as a gas supply device, as a particle detector and / or as a radiation detector, wherein the particle beam device (1) includes: at least one beam generator (5) for generating a particle beam with charged particles, - At least one objective lens (16) for focusing the particle beam on the object (4), and - at least one vacuum region (3) in which the component (21, 26, 48, 52, 139) is arranged, the process comprising the following steps: Moving the component (21, 26, 48, 52, 139) from the first starting position of the component (21, 26, 48, 52, 139) relative to the object (4) which is in the second starting position, until the component (21, 26, 48, 52, 139) touches the object (4); - When the component (21, 26, 48, 52, 139) touches the object (4), determining one of the component (21, 26, 48, 52, 139) and / or the object (4) covered in the movement OAB, wherein the displacement path (OAB) runs along a straight line which has a first point (P4) on the component (21, 26, 48, 52, 139) in the first starting position with a second point (P3) on the Object (4) in the second starting position connects, which along this straight line closest to the first point (P4) on the component (21, 26, 48, 52, 139) is arranged, wherein the adjustment path (OAB) corresponds to the distance.