Carrier cassette and the carrier cassettes stack

摘要

A carrier cassette for wafer has two oppositely located outer side walls, which in each case a top and a bottom, and between the outer side walls, receiving rods which are arranged for receiving a plurality of vertically arranged wafers. A lower receiving structure engagement on the underside of at least one of the outer side walls, engagement with a receiving structure to the lower engagement receiving structure, and fits into the upper engagement on the upper side of at least one of the outer side walls, if the carrier cassette with a further corresponding carrier cassette is stacked one above the other, in order to a lateral slipping of the carrier cassettes to counteract relative to one another. The receiving engagement structures have a recess and having a protrusion on.n="25"