首页>
外国专利>
INTEGRATED MEASUREMENT AND MICROMECHANICAL POSITIONING APPARATUS FOR REAL-TIME TEST CONTROL
INTEGRATED MEASUREMENT AND MICROMECHANICAL POSITIONING APPARATUS FOR REAL-TIME TEST CONTROL
展开▼
机译:用于实时测试控制的集成测量和微机械定位装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
The invention relates to a measurement device (120), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a sensor (150) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the having an input coupled to the sensor (150) for receiving a sensor signal from the sensor (150) to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the sensor signal. The measurement device (120) may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said sensor signal and said positioning control instructions (300).
展开▼