METHOD AND CIRCUIT FOR OPERATING A PIEZOELECTRIC MEMS SOUND TRANSDUCER AND INTEGRATED CIRCUITRY HAVING SUCH A CIRCUIT

摘要

The invention relates to a method for operating a piezoelectric MEMS sound transducer (4), in particular a MEMS loudspeaker and/or MEMS microphone operating in the audible wavelength spectrum and/or in the ultrasonic range, in which electrical energy is stored in at least one energy store (2) and this electrical energy is transferred between the energy store (2) and the piezoelectric MEMS sound transducer (4) indirectly via at least one transfer unit (3, 13). According to the invention, the at least one transfer unit (3, 13) and the piezoelectric MEMS sound transducer (4) are arranged in a parallel circuit (5) with respect to one another and are connected in such a manner that, in order to operate the piezoelectric MEMS sound transducer (4) in a first switching state, the at least one transfer unit (3) is first of all charged from the energy store (2) and this transfer unit (3) is then discharged again in a second switching state and the piezoelectric MEMS sound transducer (4) is charged in this case, and/or, in order to recover energy in a third switching state, the piezoelectric MEMS sound transducer (4) is discharged again and the at least one transfer unit (3, 13) is charged in this case and this transfer unit (3, 13) is then discharged again in a fourth switching state and the energy store (2) is charged in this case.