METHOD FOR PRODUCING HETEROCYCLE-CONTAINING POLYMER PRECURSOR, HETEROCYCLE-CONTAINING POLYMER PRECURSOR, AND USE FOR SAME

摘要

There are provided a method of manufacturing a heterocycle-containing polymer precursor having a fast cyclization rate, a heterocycle-containing polymer precursor, a composition, a cured film, a method of manufacturing a cured film, and a semiconductor device. There is provided a method of manufacturing a heterocycle-containing polymer precursor using dicarboxylic acid or dicarboxylic acid derivative and diamine as raw materials, including: halogenating the dicarboxylic acid or the dicarboxylic acid derivative by using a halogenating agent and performing reaction with diamine; and adjusting a difference between a molar amount of the halogenating agent and a molar amount of water included in a reaction system before reaction of the halogenating agent to become 2.10 times or less of a total molar amount of the dicarboxylic acid and the dicarboxylic acid derivative as the raw materials.