HARDMASK COMPOSITION, METHOD OF FORMING PATTERN USING HARDMASK COMPOSITION, AND HARDMASK FORMED FROM HARDMASK COMPOSITION

摘要

Provided are a hardmask composition including a structure represented by Formula 1 and a solvent, a method of forming a pattern using the hardmask composition, and a hardmask formed from the hardmask composition.wherein in Formula 1, R₁ to Rs, X, and M are described in detail in the detailed description.