An inspection tool for inspecting a semiconductor substrate is described, the inspection tool comprising:- an substrate table configured to hold the substrate;- an electron beam source configured to project an electron beam onto an area of interest of the substrate, the area of interest comprising a buried structure;- a cathode-luminesce detector configured to detect cathodoluminescent light emitted from the buried structure;- a control unit configured to:- control the electron beam source to project to electron beam onto the area of interest;- receive a signal representative of the detected cathodoluminescent light;- determine, based on the signal, a characteristic of the buried structure.
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