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APPARATUS AND METHOD FOR RAMAN MICROSPECTROSCOPY MEASUREMENT, AND PROGRAM
APPARATUS AND METHOD FOR RAMAN MICROSPECTROSCOPY MEASUREMENT, AND PROGRAM
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机译:拉曼显微测量的装置和方法以及程序
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摘要
To allow even non-specialists of spectrometry to quickly focus laser light on a specimen in the Raman microspectroscopy measurement and to highly efficiently perform Raman microspectroscopy measurement of a large number of specimens.SOLUTION: A control unit 110 of a Raman microspectroscopy measurement apparatus 100: applies laser light exited from a laser light source 102 to a specimen 503 sandwiched between fixing members 501 and 502, while changing a height of a stage 101 by a mechanical drive part 109 to change a facing distance between an objective lens 104 and the stage 101; extracts intensity of Raman scattering light onto the fixing member 501 or 502 and the specimen 503 from a spectroscopic part 108; and determines a value of the facing distance when it is estimated that the laser light is focused on the specimen, as a focal distance.SELECTED DRAWING: Figure 1
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