Device for holding, positioning and / or moving an object, and method of operating a device for holding, positioning and / or moving an object

摘要

An apparatus for holding, positioning and / or moving an object is described. The apparatus comprises a base (30) and a carrier (50) movable relative to the base (30). The device comprises at least three magnetic bearings, the carrier (50) being in a non-contacting manner by the magnetic bearings such that the carrier can be displaced in at least one predetermined direction (2). Supported at least two of the magnetic bearings (10) further include at least three magnetic bearings configured as actively controllable magnetic bearings. The device comprises at least one damping unit (100) fixed to a carrier (50) or a base (30). [Selected figure] Figure 11