電気機械変換素子、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置、および電気機械変換素子の製造方法

摘要

PROBLEM TO BE SOLVED: To improve a displacement characteristic when arranging electromechanical conversion films highly densely.;SOLUTION: An electromechanical conversion element comprises: a lower electrode 41, which is an individual electrode for each of electromechanical conversion films 43 formed on a vibration plate 30; a ceramic film 42 formed on the lower electrode 41; an electromechanical conversion film 43 formed on the ceramic film 42; and an upper electrode 44 formed on the electromechanical conversion films 43 and serving as a common electrode for the electromechanical conversion films 43. An insulation film 50 in which a portion where each electromechanical conversion film 43 is formed is used as an opening 52 is provided on the ceramic film 42. Each electromechanical conversion film 43 has, in at least one cross-section of the electromechanical conversion film 43, a shape in which film thickness gradually and continuously increases toward a central part from an end of the inside of the opening 52. A side face of the opening 52 of the insulation film 50 is in contact with the ceramic film 42 and is not in face contact with each electromechanical film 43.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT