作業装置及び作業装置の検査方法

摘要

PROBLEM TO BE SOLVED: To provide a work device and an inspection method thereof capable of improving the work efficiency of maintenance against clogging that reduces the suction force for suctioning a suction target.;SOLUTION: In a state where a nozzle 23 is removed from a shaft member 22, a negative pressure is supplied to an air introduction conduit 22R, and the air is suctioned via a filter member 25. Then, the air flow rate V in the air introduction conduit 22R is detected in that state, and the detected air flow rate V in the air introduction conduit 22R is compared with a first reference value (first flow rate V1) defined in advance, and it is determined whether a filter member 25 is clogged.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT