首页> 外国专利> Device for measuring the temperature field distribution inside the crucible

Device for measuring the temperature field distribution inside the crucible

机译:测量坩埚内部温度场分布的装置

摘要

An apparatus for measuring the temperature field distribution inside a crucible is provided. An apparatus for measuring the temperature field distribution inside a crucible, comprising: a crucible including an upper lid, a main body, a growth chamber, and a material filling portion; a heat insulating material provided outside the crucible; A plurality of movable heating elements for heating, and a plurality of thermoelectric elements provided inside the upper lid through the plurality of holes on the upper lid and covered with a heat-resistant insulation covering material for measuring the temperature field distribution inside the crucible Including a pair. By using a plurality of thermocouples covered with the heat-resistant insulating coating material via this, it is possible to realize an optimal temperature distribution of crystal growth by effectively measuring and adjusting the temperature distribution inside the crucible. [Selected figure] Figure 1
机译:提供了一种用于测量坩埚内部的温度场分布的设备。一种用于测量坩埚内部温度场分布的装置,包括:坩埚,包括上盖,主体,生长室和材料填充部分;设置在坩埚外部的隔热材料;多个用于加热的可移动加热元件,以及多个热电元件,其通过上盖上的多个孔设置在上盖的内部,并覆盖有用于测量坩埚内部温度场分布的耐热绝缘覆盖材料。对。通过这样使用覆盖有耐热绝缘涂料的多个热电偶,可以通过有效地测量和调节坩埚内部的温度分布来实现最佳的晶体生长温度分布。 [选定图]图1

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号