Pulse light generation apparatus, pulse light generation method, exposure apparatus and inspection apparatus provided with pulse light generation apparatus

摘要

An object of the present invention is to obtain pulsed light of high intensity which is amplified while suppressing the spread of a wavelength spectrum. A first pulse light and an intensity of the first pulse light decrease when the intensities of the first pulse light increase and an intensity increase when the intensity of the first pulse light decreases. A first optical fiber in which a second pulse light is multiplexed and is incident and propagates the inside; and a second optical fiber which receives the first pulse light emitted from the first optical fiber and propagates the inside and is amplified , Phase modulation is generated in the first pulse light by cross phase modulation from the second pulse light in the first optical fiber, and self phase modulation is generated in the first pulse light in the second optical fiber Is a configuration that is reduced by the phase modulation generated in the first optical fiber. [Selected figure] Figure 1