Mist generating apparatus, film forming apparatus, mist generating method, film forming method, and device manufacturing method

摘要

A mist generator (MG1) that generates mist (MT) containing fine particles (NP) includes a container (30a) that holds a dispersion (DIL) containing fine particles (NP), and a container (30 The first vibrating part (32a) that suppresses aggregation of the fine particles (NP) in the dispersion liquid (DIL) by giving to the dispersion liquid (DIL) in 30a), and higher than the first frequency, A second vibrating section (34a) that applies a vibration of a second frequency for generating mist (MT) containing fine particles (NP) from the surface of DIL) to the dispersion liquid (DIL) in the container (30a). Prepare.