embedded image "/> Active light sensitive or radiation sensitive resin composition, active light sensitive or radiation sensitive film, mask blank provided with active light sensitive or radiation sensitive film, pattern forming method, method for manufacturing electronic device, electronic device and novel compound
首页> 外国专利> Active light sensitive or radiation sensitive resin composition, active light sensitive or radiation sensitive film, mask blank provided with active light sensitive or radiation sensitive film, pattern forming method, method for manufacturing electronic device, electronic device and novel compound

Active light sensitive or radiation sensitive resin composition, active light sensitive or radiation sensitive film, mask blank provided with active light sensitive or radiation sensitive film, pattern forming method, method for manufacturing electronic device, electronic device and novel compound

机译:活性光敏或辐射敏感性树脂组合物,活性光敏或辐射敏感性薄膜,具有活性光敏或辐射敏感性薄膜的掩模坯料,图案形成方法,电子器件的制造方法,电子器件和新型化合物

摘要

There is provided an active light sensitive or radiation sensitive resin composition which contains (A) an alkali soluble resin and (C) a cross-linking agent represented by the following General Formula (1-0).; embedded image
机译:提供一种活性光敏或辐射敏感性树脂组合物,其包含(A)碱溶性树脂和(C)由以下通式(1-0)表示的交联剂。 “嵌入式图像”

著录项

  • 公开/公告号US10324374B2

    专利类型

  • 公开/公告日2019-06-18

    原文格式PDF

  • 申请/专利权人 FUJIFILM CORPORATION;

    申请/专利号US201615080714

  • 申请日2016-03-25

  • 分类号G03F7/038;C07C233/36;C07C271/16;C07C271/24;C07C271/34;C07C275/10;C07C275/24;C07C275/26;C07C323/60;C07D211/26;C07D233/32;C07D233/36;C07D235/26;C07D239/10;C07D251/30;C07D403/12;C07D487/04;

  • 国家 US

  • 入库时间 2022-08-21 12:16:25

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