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Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
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机译:用于制造多层MEMS组件的方法以及相应的多层MEMS组件
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摘要
A method for manufacturing a multi-layer MEMS component includes: providing a multi-layer substrate that has a monocrystalline carrier layer, a monocrystalline functional layer having a front side and a back side, and a bonding layer located between the back side and the carrier layer; growing a first polycrystalline layer over the front side of the monocrystalline functional layer; removing the monocrystalline carrier layer; and growing a second polycrystalline layer over the back side of the monocrystalline functional layer.
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