首页> 外国专利> Apparatus for producing a single crystal of a metal oxide comprising a Pt-Rh alloy heater coated with zirconia

Apparatus for producing a single crystal of a metal oxide comprising a Pt-Rh alloy heater coated with zirconia

机译:用于生产金属氧化物单晶的设备,该设备包括涂覆有氧化锆的Pt-Rh合金加热器

摘要

To provide a single crystal production apparatus that is capable of prolonging the lifetime of a heater, and capable of reducing the cost. A single crystal production apparatus of the present invention is the single crystal production apparatus which produces a single crystal of a metal oxide in an oxidative atmosphere, containing: a base body; a cylindrical furnace body having heat resistance disposed above the base body; a lid member occluding the furnace body; a heater disposed inside the furnace body; a high frequency coil heating the heater through high frequency induction heating; and a crucible heated with the heater, the heater containing a Pt-based alloy and having a zirconia coating on an overall surface of the heater.
机译:提供一种能够延长加热器的寿命并能够降低成本的单晶制造装置。本发明的单晶制造装置是在氧化性气氛中制造金属氧化物的单晶的单晶制造装置,其包含:基体;和具有耐热性的圆柱形炉体设置在基体上方;封闭炉体的盖构件;加热器设置在炉体内。高频线圈通过高频感应加热对加热器进行加热。坩埚由加热器加热,该加热器包含Pt基合金并且在加热器的整个表面上具有氧化锆涂层。

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