首页> 外国专利> WASTE LIQUID RECOVERY SYSTEM, CHEMICAL BATH DEPOSITION DEVICE AND DEPOSITION METHOD

WASTE LIQUID RECOVERY SYSTEM, CHEMICAL BATH DEPOSITION DEVICE AND DEPOSITION METHOD

机译:废液回收系统,化学浴沉积装置和沉积方法

摘要

The present disclosure provides a waste liquid recovery system, a chemical bath deposition device and a deposition method, the waste liquid recovery system comprises a waste liquid storage tank for storing the waste liquid generated by deposition of a cadmium sulfide deposition tank; a refrigeration device for refrigerating the stored waste liquid; a filtering device for filtering the waste liquid obtained after refrigerating; and a chemical liquid storage tank for storing the filtered waste liquid. The waste liquid recovery system, the chemical bath deposition device and the deposition method provided by the present disclosure provide a chemical liquid having the same concentration as an original liquid by refrigerating and filtering the waste liquid, and then replenishing the chemical raw material, thereby greatly improving the recycling of waste liquid and reducing a production cost.
机译:本公开提供了一种废液回收系统,化学浴沉积装置和沉积方法,该废液回收系统包括废液储存槽,用于储存由硫化镉沉积槽的沉积产生的废液。用于对存储的废液进行制冷的制冷装置;过滤装置,其对冷冻后的废液进行过滤。化学液体储存罐,用于储存过滤后的废液。本公开提供的废液回收系统,化学浴沉积装置和沉积方法通过对废液进行冷冻和过滤,然后补充化学原料,从而提供与原始液体具有相同浓度的化学液。改善废液的回收利用并降低生产成本。

著录项

  • 公开/公告号US2019189829A1

    专利类型

  • 公开/公告日2019-06-20

    原文格式PDF

  • 申请/专利号US201816145687

  • 发明设计人 LEI WANG;

    申请日2018-09-28

  • 分类号H01L31/18;C23C18/12;H01L21/66;H01L31/0296;

  • 国家 US

  • 入库时间 2022-08-21 12:09:31

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号