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CHARGED PARTICLE DEVICE, STRUCTURE MANUFACTURING METHOD, AND STRUCTURE MANUFACTURING SYSTEM
CHARGED PARTICLE DEVICE, STRUCTURE MANUFACTURING METHOD, AND STRUCTURE MANUFACTURING SYSTEM
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机译:带电粒子设备,结构制造方法和结构制造系统
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摘要
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摘要
A charged particle device includes an electron emitting part for emitting electrons, an electron irradiated part configured to be irradiated with the electrons emitted from the electron emitting part, a container part configured to evacuate an interior thereof and contain the electron irradiated part in the interior thereof, an electric wire containing part configured to be inserted from an outside of the container part via an insertion part provided in the container part to contain an electric wire through which electricity is conducted to the electron irradiated part contained in the container part, and an insertion-part-side protrusion part configured to surround the electric wire containing part and protrude from a vicinity of the insertion part on an inner wall of the container part to an interior of the container part.
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