Method of production of a porous diamond layer and a thick porous diamond layer reinforced with nanofibres

摘要

The present invention describes a process for producing a porous diamond layer (1, 6) and a porous diamond body (7) reinforced nanofiber. The method includes the step of inoculating diamond nanoparticles into nanofibers of any material capable of withstanding plasma supported storage conditions. The inoculated nanofibers are then mixed into sacrificial material. This mixture is then applied to the substrate and dried to form a solid nanofiber / sacrificial material composite. The resulting composite film is then subjected to plasma supported chemical deposition of the diamond from the vapor phase under conditions where the sacrificial material is decomposed. These steps can be repeated to form a nanofiber reinforced porous diamond layer of the desired thickness. Diamond can be doped with boron. Such boron-doped conductive porous diamond layers serve for microelectonic (MEMS) applications where chemical stability is desired. Diamond-doped porous diamond layers can be used as sensors, supercapacitors, and / or filters for separating organic electrochemicals.