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ACTIVE MONITORING SYSTEM FOR SUBSTRATE BREAKAGE PREVENTION
ACTIVE MONITORING SYSTEM FOR SUBSTRATE BREAKAGE PREVENTION
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机译:主动监测系统,可防止基层断裂
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摘要
A method and apparatus for monitoring substrate lift pin operation is disclosed and includes a support pedestal for a vacuum chamber, the support pedestal comprising a body having a plurality of openings formed between two major sides of the body, and a substrate support device disposed in each of the plurality of openings, each of the support devices comprising a housing disposed in the body, the housing having a bore formed therethrough, and a support pin disposed in the bore, wherein the body includes a monitoring device positioned proximal to the support pins of each of the substrate support devices.
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