The present invention relates to a two-dimensional laser displacement gauge, a movement mechanism for moving a two-dimensional laser displacement gauge in the X-axis direction, a movement distance measurement device for measuring a movement distance of the two-dimensional laser displacement gauge in the X- A three-dimensional surface roughness evaluating apparatus comprising: an arithmetic unit for generating three-dimensional surface roughness data to be measured on the basis of displacement data and movement distance data acquired by the movement distance measuring apparatus, wherein the two- Dimensional laser displacement gauge so that the width direction of the two-dimensional laser displacement gauge coincides with the Y-axis direction so that the displacement data of the two-dimensional laser displacement gauge can be measured every two times And the arithmetic unit averages the displacement data acquired at regular intervals in the X-axis direction by the two-dimensional laser displacement gauge in the Y-axis direction, Dimensional surface roughness data of the object to be measured by generating the reference surface data of the coordinates and subtracting the reference surface data of each coordinate from the displacement data of each X-Y plane coordinate.
展开▼
