NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM STORING PROGRAM OF STRETCHING OPERATION OF ELASTIC MEMBRANE, METHOD OF STRETCHING OPERATION OF ELASTIC MEMBRANE, AND POLISHING APPARATUS

摘要

Provided is a non-transitory computer-readable storage medium storing a program of stretching operation of an elastic membrane which can enhance elasticity of an elastic membrane in a short time without using a dummy wafer. A program of stretching operation of an elastic membrane (10) in a substrate holding apparatus (1) causes a computer to perform stretching operation of supplying a pressurized fluid to a pressure chamber of the elastic membrane (10) and allowing the pressure chamber to be open to the atmosphere a predetermined number of times by a pressure regulating device (65) in a state where the substrate holding apparatus (1) is positioned above a polishing table (18) during standby operation of a polishing apparatus.;COPYRIGHT KIPO 2019