Virtual Measurement Method for ESC Temperature Estimation Using TCEs (thermal control elements)

摘要

The temperature controller for the substrate support of the substrate processing system stores a first model that correlates the temperatures of the plurality of first thermal control elements (TCEs) disposed in the substrate support with the first temperature responses of the substrate support. It contains memory. The first temperature responses correspond to the locations on the surface of the substrate support. The temperature estimation module calculates the resistances of the first TCEs, determines the temperatures of the first TCEs based on the calculated resistances, and uses the stored temperatures of the first model and the first TCEs to determine the actuality of the substrate support. Estimate the temperature response. The temperature controller is configured to control the first TCEs based on the actual temperature response of the substrate support.