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The device patterning phase difference film of defects detection can detect the patterning phase difference film of defect with excellent precision
The device patterning phase difference film of defects detection can detect the patterning phase difference film of defect with excellent precision
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机译:缺陷检测的图案化相差膜装置能够以优异的精度检测缺陷的图案化相差膜。
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摘要
PURPOSE: A device for detecting defects of a patterned phase difference film is provided to arrange first and second phase difference areas by turns and to defect the defects of the patterned phase difference film at excellent precision.;CONSTITUTION: A device(10) for detecting defects of a patterned phase difference film(12) comprises a first polarizing plate(18), a second polarizing plate(19), a light source unit(16), a photographing device(17), and a defect detecting unit. The first and second polarizing plates are cross-Nicole arranged to support the patterned phase difference film. The light source unit interposes the first polarizing plate, thereby irradiating inspection lights to the patterned phase difference film. The photographing unit interposes the second polarizing plate, thereby obtaining brightness images by photographing the patterned phase difference film. The defect detecting unit detects defects of the brightness images.;COPYRIGHT KIPO 2013;[Reference numerals] (20) Defect detecting unit
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