PROBLEM TO BE SOLVED: To provide a practical method for enabling baseline correction in interferogram data. SOLUTION: Light from an object S irradiated with light is separated into two lights by a Sabar plate 21 and combined by a projection lens 24 to form an interferogram on a light receiving surface of an array detector 3. The interferogram data from the detector 3 is baseline corrected by the interferogram data correction program 44 in the calculation means 4. The interferogram data correction program 44 performs a moving average for updating the update target data with the average value of a predetermined number of consecutive element data before and after, and repeats this process from the interferogram data. Remove the interference fringe data. The baseline is corrected by subtracting from the obtained illuminance distribution data interferogram data. [Selection diagram] Fig. 3
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