首页> 外国专利> Interferogram data correction method, interferogram data correction program, spectroscopic measuring device, and spectroscopic measuring method

Interferogram data correction method, interferogram data correction program, spectroscopic measuring device, and spectroscopic measuring method

机译:干涉图数据校正方法,干涉图数据校正程序,光谱测量装置和光谱测量方法

摘要

PROBLEM TO BE SOLVED: To provide a practical method for enabling baseline correction in interferogram data. SOLUTION: Light from an object S irradiated with light is separated into two lights by a Sabar plate 21 and combined by a projection lens 24 to form an interferogram on a light receiving surface of an array detector 3. The interferogram data from the detector 3 is baseline corrected by the interferogram data correction program 44 in the calculation means 4. The interferogram data correction program 44 performs a moving average for updating the update target data with the average value of a predetermined number of consecutive element data before and after, and repeats this process from the interferogram data. Remove the interference fringe data. The baseline is corrected by subtracting from the obtained illuminance distribution data interferogram data. [Selection diagram] Fig. 3
机译:要解决的问题:提供一种可行的方法来启用干涉图数据中的基线校正。解决方案:来自物体S的光被Sabar板21分成两束光,并由投影透镜24组合,在阵列探测器3的光接收表面上形成干涉图。来自探测器3的干涉图数据为在计算装置4中由干涉图数据校正程序44校正了基线。干涉图数据校正程序44执行移动平均值,该移动平均值用于以预定数目的前后连续元素数据的平均值来更新更新目标数据,并重复该步骤。从干涉图数据进行处理。删除干涉条纹数据。通过从获得的照度分布数据干涉图数据中减去基线来校正基线。 [选择图]图3

著录项

  • 公开/公告号JP2020143972A

    专利类型

  • 公开/公告日2020-09-10

    原文格式PDF

  • 申请/专利权人 ウシオ電機株式会社;

    申请/专利号JP20190040048

  • 发明设计人 世良 英之;

    申请日2019-03-05

  • 分类号G01J3/45;G01J3/02;

  • 国家 JP

  • 入库时间 2022-08-21 11:36:39

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号