OXYGEN PLASMA TREATED RESIN FILM, GAS BARRIER VAPOR DEPOSITION FILM AND GAS BARRIER LAMINATE USING THE GAS BARRIER VAPOR DEPOSITION FILM, GAS BARRIER PACKAGING MATERIAL, GAS BARRIER PACKAGE, GAS BARRIER PACKAGING BAG AND MANUFACTURING METHOD OF THESE

摘要

To provide an oxygen plasma treated resin film capable of having an inorganic vapor deposition layer with excellent waterproof adhesion against a resin film as well as excellent in gas barrier properties, a gas barrier vapor deposition film produced by laminating an inorganic vapor deposition layer onto the oxygen plasma treated resin film, a laminate using the gas barrier vapor deposition film, a packaging material, a package and a manufacturing method of these.SOLUTION: An oxygen plasma treated resin film has an oxygen plasma treated surface for forming an inorganic vapor deposition layer, on one side thereof. In the oxygen plasma treated resin film, the oxygen plasma treated surface is a surface formed by: making a resin film continuously pass through a space in which plasma electrodes and a magnet are facing with each other in a substantially constant distance under atmospheric pressure of 1-9 Pa, and oxygen plasma is held by the magnet in a substantially homogeneous density; and substantially vertically colliding the oxygen plasma on one side of the resin film by bias voltage between the plasma electrodes.SELECTED DRAWING: Figure 1