System and method for reconstructing high resolution point spread function from low resolution inspection images

摘要

A method for reconstructing one or more high-resolution point spread functions (PSFs) from one or more low-resolution images, capturing one or more low-resolution images of a wafer and using one or more of them. Assembling a plurality of low-resolution image patches and estimating one or more sub-pixel shifts in the one or more low-resolution images while simultaneously combining the one or more integrated low-resolution images; One or a plurality of high-resolution PSFs are reconstructed from the resolution image patches.