Probe movable range setting device and movable range setting method

摘要

An x-axis movable range, a y-axis movable range, and a z-axis movable range of a probe at the time of an ultrasonic inspection are set in a stage prior to inspecting an object to be inspected. An x-axis movable range setting unit configured to set an x-axis movable range of the probe in an x-axis direction by moving the probe in an x-axis direction that is an extending direction of a surface of the inspection object; A y-axis movable range setting unit 111 that sets a y-axis movable range of the probe in the y-axis direction by moving the probe in a y-axis direction orthogonal to the x-axis and in a direction in which the surface of the inspection object extends; A z-axis movable range setting unit 121 that sets the z-axis movable range of the probe in the z-axis direction by moving the probe in the z-axis direction that is the height direction of the object to be inspected. [Selection diagram] FIG.