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Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device
Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device
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机译:液位检测装置,液位检测方法,高温等离子体原料供给装置以及极紫外光源装置
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摘要
Disclosed herein a liquid level detection device capable of appropriately detecting a liquid level of a high temperature plasma raw material in a reservoir for storing the high temperature plasma raw material. The liquid level detection device includes: an upper limit level sensor configured to detect that the liquid level of the tin is elevated from downward to reach an upper limit level; and a refilling level sensor configured to detect that the liquid level of the tin is lowered from upward to reach a refilling level or a lower limit level. A detection responsiveness of the liquid level of the upper limit level sensor is higher than the refilling level sensor or the lower limit level sensor, and a detectability of the liquid level of the refilling level sensor or the lower limit level sensor is higher than the upper limit level sensor.
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