RADIATION MEASUREMENT PENAL, DEVICE AND SYSTEM

摘要

A radiation measurement panel is disclosed. The radiation measurement panel comprising a substrate, a first conductive layer, a sacrificial layer, and a second conductive layer. The first conductive layer formed over the substrate. The sacrificial layer formed over the first conductive layer, wherein the dielectric constant of the sacrificial layer changes in accordance with a magnitude of received radiation. The second conductive layer formed over the sacrificial layer, wherein the magnitude of the received radiation corresponds to a capacitance between the first conductive layer and the second conductive layer.