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Post-Processing Techniques on MEMS Foundry Fabricated Devices for Large Angle Beamsteering
Post-Processing Techniques on MEMS Foundry Fabricated Devices for Large Angle Beamsteering
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机译:大角度波束转向的MEMS铸造制造设备上的后处理技术
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摘要
A method of post-processing an actuator element is presented. The method begins by receiving a fabricated actuator element including a metallic layer contacting a substrate, sacrificial layer proximate the metallic layer, and a first dielectric layer on the sacrificial layer. The metallic layer has an end proximal to and contacting at least part of the substrate and a distal end extending over the first dielectric layer. A second dielectric is deposited on a portion of the metallic layer at the distal end. And, the sacrificial layer is removed.
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