Patterned Plasmonic Nanoparticle Arrays for Multiplexed, Microfluidic Biosensing Assays

摘要

Methods for fabricating a localized surface plasmon renosance (LSPR) biosensing microfluidic or spot-plate device that combines the techniques photolithography and hole-mask colloidal lithography in a unique way to yield highly sensitive yet cost-efficient devices capable of miniaturization and portability, along with the devices and methods of utilizing the devices are disclosed. The desired device pattern is transferred to a photoresist on a substrate using photolithography; at least two coats of polymer are spin-coated onto the substrate to form a polymer layer, a plurality of polystyrene particles of a desired shape and size are drop-coated on the polymer layer, a nanomeric layer of gold is deposited thereover, the polystyrene particles are removed, the hole-mask is etched, a plasmonic metal is deposited into the holes, and the polymer layer and photoresist are then removed prior to optionally sealing with a cover.