首页> 外国专利> POLARIZATION PROPERTY IMAGE MEASUREMENT DEVICE, AND POLARIZATION PROPERTY IMAGE MEASUREMENT METHOD

POLARIZATION PROPERTY IMAGE MEASUREMENT DEVICE, AND POLARIZATION PROPERTY IMAGE MEASUREMENT METHOD

机译:极化属性图像测量装置及极化属性图像测量方法

摘要

A polarization property image measurement device includes: a first radiation unit that radiates light beams in different polarization conditions onto a target object after subjecting the light beams to intensity modulation at frequencies different from one another; a light receiving unit including first photoelectric conversion units that photoelectrically convert the light beams having been radiated from the first radiation unit and scattered at the target object in correspondence to each of the different polarization conditions, and second photoelectric conversion units that photoelectrically convert visible light from the target object; and a processor that detects signals individually output from the first photoelectric conversion units at the different frequencies and differentiates each signal from other signals so as to determine an origin of the signal as one of the light beams; and creates an image of the target object based upon signals individually output from the second photoelectric conversion units.
机译:偏振特性图像测量装置包括:第一辐射单元,在以彼此不同的频率对光束进行强度调制之后,将不同偏振条件的光束辐射到目标物体上。光接收单元包括:第一光电转换单元,其对应于每个不同的偏振条件光电转换从第一辐射单元发射并散射在目标物体上的光束;第二光电转换单元,光电转换来自目标对象;处理器检测从第一光电转换单元以不同的频率分别输出的信号,并将每个信号与其他信号区分开,以将该信号的原点确定为光束之一。并且基于从第二光电转换单元分别输出的信号来创建目标物体的图像。

著录项

  • 公开/公告号US2020173911A1

    专利类型

  • 公开/公告日2020-06-04

    原文格式PDF

  • 申请/专利权人 NIKON CORPORATION;

    申请/专利号US202016781474

  • 发明设计人 TAKANORI KOJIMA;SATORU ODATE;TORU TAKAGI;

    申请日2020-02-04

  • 分类号G01N21/21;H01L27/146;G06T15;G01N21/31;A61B1/06;A61B1;G06T7/521;A61B1/04;G01J3/51;G01J3/28;G01N21/25;G01J3/02;G01J4/04;G01J4;G01J3;

  • 国家 US

  • 入库时间 2022-08-21 11:20:04

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