design for manufacturing cells (dfm) in extreme ultraviolet technology (euv)

摘要

aspects of disclosure are directed to a circuit. according to one aspect, the circuit includes a first layer, wherein the first layer includes two-dimensional shapes (2d); a second layer coupled adjacent the first layer through at least one through hole, wherein the second layer includes only unidirectional shapes (1d); a shared drain terminal; and a termination of the originating terminal.