MEMS microphone and method of manufacturing the same

摘要

Disclosed is a MEMS microphone that converts sound into electrical signals and outputs them. The MEMS microphone includes a substrate having a cavity, a back plate provided on the upper side of the substrate, a diaphragm positioned spaced apart from the substrate and the back plate between the substrate and the back plate, and an anti-buckling portion provided between the substrate and the diaphragm. . The diaphragm is provided to cover the cavity, and senses negative pressure to generate displacement. The anti-buckling portion supports the diaphragm to prevent buckling of the diaphragm. Accordingly, since the MEMS microphone can prevent the diaphragm from being struck below an appropriate standard, the diaphragm can have a tensile stress and prevent the diaphragm buckling phenomenon.