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MEMS MEMS DEVICE AND PROCESS

机译:MEMS MEMS设备与工艺

摘要

This application relates to MEMS devices, particularly MEMS capacitive transducers, and processes to form such MEMS transducers that provide increased robustness and elasticity to acoustic shock. This application describes a transducer structure having a flexible membrane 101 supported between a first volume 109 and a second volume 110. The transducer structure includes at least one variable vent structure 401 in communication with at least one of the first and second volumes, the variable vent structure comprises at least one movable part, and the movable part is It can move to change the size of the flow path through the vent structure in response to the pressure difference across it. A variable vent can be formed through the membrane, and the movable portion can be a portion of the membrane defined by one or more channels that can be deflected away from the surface of the membrane. The variable vent is preferably closed at a normal range of pressure differentials, but at high pressure differentials it opens to provide faster equalization of air above and below the membrane.
机译:本申请涉及MEMS装置,特别是MEMS电容式换能器,以及形成这种MEMS换能器的方法,该MEMS换能器对声震具有增强的鲁棒性和弹性。本申请描述了一种换能器结构,该换能器结构具有支撑在第一体积109和第二体积110之间的柔性膜101。该换能器结构包括与第一和第二体积中的至少一个连通的至少一个可变通风口结构401,可变通风口。该结构包括至少一个可移动部分,该可移动部分可以响应于其两端的压差而移动以改变通过通风口结构的流路的尺寸。可以形成穿过膜的可变通气孔,并且可移动部分可以是由一个或多个通道限定的膜的一部分,该一个或多个通道可以偏离膜的表面偏转。可变排气口优选在压力差的正常范围内关闭,但是在高压差下它打开以提供膜上方和下方的更快的空气均衡。

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