The present invention includes a fixed substrate having a cavity, a driving portion disposed in the cavity, floating from the fixed substrate, physically connecting the fixed substrate and the driving portion, and including an elastic portion varying the height of the driving portion according to the control current And, the fixed substrate includes a support portion protruding from the region connected to the elastic portion, and the support portion provides a MEMS element having grooves formed to be spaced apart from the fixed substrate on both sides. Therefore, by applying an impact reinforcement structure capable of buffering the impact when an impact is applied in the vertical direction of the driving direction, it is possible to prevent the driver from being damaged by the impact by buffering the impact applied in the vertical direction of the driving direction.
展开▼
