Spatial frequency filter device for use with a laser beam, spatial frequency filter arrangement with such a spatial frequency filter device and method for spatial frequency filtering of a laser beam

摘要

The invention relates to a spatial frequency filter device (100) for use with a laser beam (200), with a neutral area (110) which is set up to transmit or reflect the laser beam (200), a deflection area radially adjoining the neutral area (110) (120) which is set up to deflect beam components (210) of the laser beam (200) from a beam axis (A) of the laser beam (200), the deflection region (120) having a constant section (123) in which a deflecting effect on the Beam components (210) of the laser beam (200) for each location in the constant section (123) is independent of a distance of the location from the neutral area (110), and wherein the deflection area (120) has a variation section (125) in which the deflection effect on the beam portions (210) of the laser beam (200) varies depending on a distance from the neutral region (110).