This research is about the silicon development device,A cup with a certain amount of space inside,It is arranged on the inner side of the cup to fix and rotate the wafer,A reversal device set to reverse the alternate revolution by 180 degrees.The developer nozzle arranged on the upper part of the inner side of the cup,The utility model is composed of a primary semen nozzle and a secondary semen nozzle arranged at the lower part,We will implement a new regulation,We can reverse the implementation of the second new policy,Foreign matters and washing solution in the wafer will be removed.
展开▼