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Wafer developer

摘要

This research is about the silicon development device,A cup with a certain amount of space inside,It is arranged on the inner side of the cup to fix and rotate the wafer,A reversal device set to reverse the alternate revolution by 180 degrees.The developer nozzle arranged on the upper part of the inner side of the cup,The utility model is composed of a primary semen nozzle and a secondary semen nozzle arranged at the lower part,We will implement a new regulation,We can reverse the implementation of the second new policy,Foreign matters and washing solution in the wafer will be removed.

著录项

  • 公开/公告号KR960015601U

    专利类型实用新型

  • 公开/公告日1996.05.17

    原文格式PDF

  • 申请/专利权人 엘지반도체주식회사;

    申请/专利号KR19940028004

  • 发明设计人 이홍구;

    申请日1994.10.26

  • 分类号H01L21/304;

  • 国家 KR

  • 入库时间 2022-08-21 10:59:32

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