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Alignment device

摘要

This research is about the ring device. In order to prevent the errors caused by the ring mark and the pattern movement phenomenon during the manufacturing of semiconductor components, it includes the design pattern movement game mark completed to prevent the pattern movement game. Clear direction and enthusiasm can prevent operation errors and major accidents.

著录项

  • 公开/公告号KR960015627U

    专利类型实用新型

  • 公开/公告日1996.05.17

    原文格式PDF

  • 申请/专利权人 한국전자주식회사;

    申请/专利号KR19940028688

  • 发明设计人 윤인수;

    申请日1994.10.31

  • 分类号H01L21/68;

  • 国家 KR

  • 入库时间 2022-08-21 10:59:31

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