High Frequency Characteristics of Fe65Co35 Alloy Cluster-Assembled Films Prepared By Energetic Cluster Deposition

摘要

Size-monodispersed Fe(65)Co(35) alloy clusters whose average sizes ranged between 7 and 12 nm were obtained using a plasma-gas-condensation (PGC)-type cluster deposition apparatus. Positively charged clusters in a cluster beam were accelerated electrically and deposited onto a negatively biased substrate together with neutral clusters from the same cluster source, leading to formation of a high-density Fe(65)Co(35) alloy cluster-assembled films with soft magnetic properties. High frequency magnetic characteristics were studied for these films prepared at room temperature by an energetic cluster deposition with and without O(2) gas addition into a cluster deposition chamber.