Study of Mechanism and Design of Oxygen Micro-sensor Based on MEMS

摘要

【中文文摘】采用溶胶-凝胶(Sol gel)法制备氧敏感膜,并对其不同的药品配比进行成膜质量与响应时间的测试与比较。设计一系列实验对该传感器的氧敏感机理进行研究。结合MEMS技术,设计MOSFET氧气微传感器结构,在器件中集成了加热元件和测温元件。实验结果表明:该传感器响应时间快,有较高的灵敏度,较好的重复性、选择性和稳定性。该传感器的机理研究与设计为基于MEMS技术的氧气微传感器的深入研究提供一定的参考。【英文文摘】Based on the theory of Solgel,YSZ sensitive membrane was made.And the quality and response time of solgel membranes with the different zirconia concentration were tested and compared.A series of experiments were designed to study the mechanism of oxygen sensitivity.Based on MEMS fabrication processing,the structure of MOSFET oxygen microsensor was presented.The heater and temperature sensor are integrated into the device.The experimental results indicate that the sensor possesses quick response time,relatively higher sensitivity,better repetition,selectivity and stability. The study of mechanism and the design of this sensor provides some reference for the in-depth study on the oxygen micro-sensor based on MEMSin the future