Electrochemical mechanical micromachining based on confined etchant layer technique

摘要

National Science Foundation of China [91023006, 91023047, 91023043, 21061120456, 21021002]; Natural Science Foundation of Fujian Province of China [2012J06004]; Fundamental Research Funds for the Central Universities [2010121022]; Scientific Research Foundation for the Returned Overseas Chinese Scholars (State Education Ministry)