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A Study on the Effect of Bond Stress and Process Temperature on Palladium Coated Silver Wire Bonds on Aluminum Metallization

机译:键合应力和工艺温度对铝金属化镀钯银丝键合影响的研究

摘要

In the past ten years, the increasing price of gold has motivated the wire bonding industry to look for alternative bonding wire materials in the field of microelectronics packaging. A new candidate wire to replace gold is palladium coated silver wire. In this thesis, the effect of the two specific process parameters “bond stress” and “process temperature” on the ball bonds made with the new candidate wire are investigated. Using 20 μm diameter wire and various level-combinations of these process parameter, ball bonds are produced according to a special accelerated optimization method to result in a target diameter of 46 ± 0.5 μm and target height of 16 ± 0.5 μm. Three different levels are used for each of the specific process parameters. After pre-selecting a few process parameters, the accelerated method determines the levels for the process parameters “impact force” and “electric flame-off current” with a 2×2 design of experiments. Then, the ultrasound parameter is maximized up to a level where a pre-selected ultrasonic deformation occurs to the bonds, maintaining the target bond diameter and height. The bond quality is measured by measuring the shear strength of the bonds. The results show that• the bond geometry is not affected by the bond stress,• the optimized specific process parameters vary by less than ~0.5 % when bond stress values are varied from 60 to 100 MPa,• the variations in optimized parameters are larger than ~3.0 % when the BT is changed from 100 to 200 ºC,• ball bonds achieve acceptable shear strength (> 120 MPa) when the values for both, bond stress and bond temperature, are high,• ultrasound level and shear stress interact, the higher shear stress the lower the ultrasound level required.An average shear strength of ~120 MPa is achieved with 11.4 % ultrasound, 100 MPa bond stress, and 200 ºC bond process temperature. In summary, a robust methodology is presented in this thesis to efficiently optimize the ball bonding process as demonstrated with the new candidate wire has a bondability similar to that of gold wire with only minor adjustment in the bonding process needed.
机译:在过去的十年中,金价的上涨促使引线键合行业在微电子封装领域寻找替代键合引线材料。替代金的新候选导线是镀钯银线。本文研究了两个特定的工艺参数“键合应力”和“工艺温度”对用新的候选焊丝进行的球形键合的影响。使用直径为20μm的焊丝以及这些工艺参数的不同水平组合,可以根据特殊的加速优化方法生产球形键合,从而使目标直径为46±0.5μm,目标高度为16±0.5μm。每个特定的过程参数使用三个不同的级别。在预先选择了几个过程参数之后,加速方法通过2×2实验设计确定了过程参数“冲击力”和“电熄火电流”的水平。然后,将超声参数最大化,直到对键发生预选的超声变形的水平,同时保持目标键的直径和高度。粘结质量通过测量粘结的剪切强度来测量。结果表明:•粘结几何形状不受粘结应力的影响;•当粘结应力值从60到100 MPa变化时,优化的特定工艺参数变化小于〜0.5%;•优化参数的变化大于当BT从100变为200ºC时约为〜3.0%,•当粘结应力和粘结温度的值都很高时,球形粘结达到可接受的剪切强度(> 120 MPa),•超声水平和剪切应力相互作用,较高的剪切应力会降低所需的超声强度。在11.4%的超声,100 MPa的粘结应力和200ºC的粘结过程温度下,平均剪切强度约为120 MPa。综上所述,本文提出了一种鲁棒的方法,可以有效地优化球焊工艺,新的候选焊丝具有与金丝相似的可焊性,而对焊丝工艺的调整很小。

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    Gomes Jimy;

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  • 年度 2015
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  • 正文语种 en
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