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Comparison of Thermal Evaporation and Plasma Assisted Thermal Evaporation Processes for Deposition of Tin Oxide Thin Films

机译：热蒸发和等离子体辅助热蒸发工艺沉积氧化锡薄膜的比较

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C. Jariwala; T. Garg; R. Rane; N. Chauhan; P.A. Rayjada; C.J. Panchal; P.I. John;
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年度 2011
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入库时间 2022-08-20 21:11:39

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1. Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) yields better Hydrolytical Stability of Biocompatible SiOx Thin Films on Implant Alumina Ceramics compared to Rapid Thermal Evaporation Physical Vapor Deposition (PVD) [J] . Boeke Frederik, Giner Ignacio, Keller Adrian, ACS applied materials & interfaces . 2016,第28期

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2. Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) yields better Hydrolytical Stability of Biocompatible SiOx Thin Films on Implant Alumina Ceramics compared to Rapid Thermal Evaporation Physical Vapor Deposition (PVD) [J] . Boeke Frederik, Giner Ignacio, Keller Adrian, ACS applied materials & interfaces . 2016,第28期

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3. Structural and optical studies of molybdenum oxides thin films obtained by thermal evaporation and atomic layer deposition methods for photovoltaic application [J] . Tianyu Pan, Jingye Li, Yinyue Lin, Journal of materials science . 2021,第3期

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4. Comparison of Characteristics of Rapid Thermal and Microwave Annealed Amorphous Silicon Thin Films Prepared by Electron Beam Evaporation and Low Pressure Chemical Vapor Deposition [C] . Chi-Hua Hsieh, Li-Te Tsou, Sheng-Hao Chen, International Conference of Health, Structure, Material and Environment . 2013

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5. The construction of a thermally-evaporated thin film deposition module [D] . Kim, Myungsoo 1990

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6. Deposition of Nanostructured CdS Thin Films by Thermal Evaporation Method: Effect of Substrate Temperature [O] . Nafiseh Memarian, Seyeed Mohammad Rozati, Isabella Concina, 2017

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7. Preparation and Characterization of Antimony Doped Tin Oxide Thin Films Synthesized by Co-Evaporation of Sn and Sb using Plasma Assisted Thermal Evaporation [O] . Jariwala C., Dhivya M., Rane R., 2013

机译：等离子体辅助热蒸发法共蒸镀锡和锑的锑掺杂氧化锡薄膜的制备与表征

Comparison of Thermal Evaporation and Plasma Assisted Thermal Evaporation Processes for Deposition of Tin Oxide Thin Films

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