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Development of tunable terahertz quantum cascade wire lasers

机译:可调谐太赫兹量子级联线激光器的研制

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摘要

For a long time, terahertz (THz) radiation has been of great interest to scientific community because of its spectroscopic and imaging applications based on its unique properties, such as the capabilities to penetrate many materials which are opaque in other frequency range (e.g. packaging, plastics, paints and semiconductors), and spectroscopic signatures of many important materials. In this thesis, a continuously tunable THz wire QC laser, which comprises a QC laser with deep sub-wavelength transverse dimensions, and a movable side object, termed as "plunger", is demonstrated. This deep sub-wavelength cross-section results in a large fraction of mode propagating outside of the laser core (GaAs/A1₀.₁₅Ga₀.₈₅As material system). The frequency tuning is achieved by changing the transverse wave vector, using a plunger made by metal (metal plunger) or silicon (dielectric plunger). When nudged close to the wire laser core, the metal plunger can push modes to the opposite side of the waveguide. Confined by a metal-metal waveguide, the mode is squeezed and the transverse wave vector is increased, resulting in a blue-shifted frequency. In contrast, a silicon plunger can suck the mode out due to its similar refractive index to GaAs/Al₀.₁₅Ga₀.₈₅As material system of laser core. Thus a decreased transverse wave vector results in a redshifted frequency. Although a tuning record of 138GHz (3.6%) was achieved, a discontinuous tuning resulted from a jittering movement of the plungers due to its friction with the guiding system. To solve this problem, an improved plunger based on micro-mechanical system (MEMS) was implemented. This MEMS plunger uses a two-stage folded-beam flexure to isolate the misaligned external actuation. The plunger is attached with the flexure which suspends above a silicon substrate to eliminate friction. Eventually, this MEMS flexure was actuated by a mechanical system which comprised a lever to de-amplify the displacement of a linear mechanical feedthrough. This MEMS plunger enabled a restorable and frictionless movement which led to a continuous tuning range of 330GHz (8.6%) centered at ~3.85 THz. The challenges posted by the weak mode discrimination led to the development of comb-shape connectors which electrically connect the top metal of wire lasers and the side bonding pad. This design can significantly increase the mode discrimination by selectively guiding undesired mode into the lossy bonding pad. This robust design of single mode operation enables the initial lasing at a frequency far below the gain peak, which can potentially increase the tuning range significantly.
机译:长期以来,太赫兹(THz)辐射一直受到科学界的关注,这是因为其具有独特的特性(例如,能够穿透许多在其他频率范围内不透明的材料(例如,包装,塑料,油漆和半导体),以及许多重要材料的光谱特征。在本文中,演示了一种连续可调的THz线QC激光器,该激光器包括具有深亚波长横向尺寸的QC激光器和可移动的被测物体,称为“柱塞”。这种深的亚波长横截面导致很大一部分模式传播到激光芯外部(GaAs /A1₀.₁₅Ga₀.₈₅As材料系统)。使用金属(金属柱塞)或硅(电介质柱塞)制成的柱塞,通过改变横波矢量来实现频率调谐。当推到靠近线激光芯时,金属柱塞会将模式推向波导的另一侧。在金属-金属波导的限制下,模式被压缩并且横向波矢量增加,从而导致蓝移频率。相反,由于硅柱塞的折射率与GaAs /Al₀.₀Ga₀.₈₅As激光芯的材料系统相似,因此可以将模式吸出。因此,减小的横向波矢量导致红移频率。尽管获得了138GHz(3.6%)的调谐记录,但由于柱塞与导向系统之间的摩擦而导致的抖动运动导致了不连续的调谐。为了解决这个问题,实现了一种基于微机械系统(MEMS)的改进的柱塞。该MEMS柱塞采用两段式折叠梁弯曲件,以隔离未对准的外部致动。柱塞附有挠性,该挠性悬挂在硅基板上方以消除摩擦。最终,这种MEMS挠曲是由一个机械系统驱动的,该机械系统包括一个杠杆,以减小线性机械馈通的位移。这款MEMS柱塞实现了可恢复且无摩擦的运动,从而导致了以〜3.85 THz为中心的330GHz(8.6%)连续调谐范围。弱模式识别带来的挑战导致了梳形连接器的发展,该连接器电连接线激光器的顶部金属和侧面焊盘。通过有选择地将不希望的模式导入有损焊盘,该设计可以显着增加模式辨别力。这种可靠的单模工作设计可以在远低于增益峰值的频率进行初始激射,从而有可能显着增加调谐范围。

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