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Langasite bulk acoustic wave resonant sensor for high temperature applications

机译:用于高温应用的Langasite体声波谐振传感器

摘要

(cont.) The self consistent defect model established the defect chemistry of langasite, enabling important parameters describing reduction (Er = 5.70± -0.06eV and 6.57±-0.24eV for acceptor and donor doped langasite respectively) and oxidation (Eo = 2.18±0.08eV), intrinsic electron-hole generation (Eg [approx. equals] 4.0-4.4eV) and defect ionization (ED-ion = 52±0.06eV for Nb ionization), to be extracted. The predictive defect model was used to calculate the dependence of the partial ionic and electronic conductivities and mass change as functions of temperature, dopant level and pO₂. Given that the magnitudes of conductivity and mass change directly affect the resolution and sensitivity limits of langasite resonators, their predictions allowed for the definition of acceptable operating limits and/or the design of properties for optimum resolution and sensitivity. Two high temperature applications of resonant sensors were studied. Praseodymiumcerium oxide was selected for oxygen partial pressure monitoring and is representative of films which change mass upon absorption or desorption of gaseous species. Barium carbonate film was selected for NO₂ sensing and is representative of films which change mass upon reaction with the gas phase to form a new product phase. Both sensors showed sensitivity to their respective target chemicals and demonstrated the feasibility of high temperature sensor applications. The performance of each sensor was discussed and suggestions for improving sensor performance were presented.
机译:(续)自洽缺陷模型建立了硅酸镧铁矿的缺陷化学性质,使描述氧化还原(Er = 5.70±-0.06eV和6.57±-0.24eV的受体和供体掺杂的硅酸铝镁的重要参数)和氧化(Eo = 2.18± 0.08eV),本征电子空穴生成(例如,约等于4.0-4.4eV)和缺陷电离(对于Nb电离,ED离子= 52±0.06eV)。使用预测性缺陷模型来计算部分离子和电子电导率以及质量变化随温度,掺杂水平和pO 2的变化关系。考虑到电导率和质量变化的幅度直接影响硅钛矿谐振器的分辨率和灵敏度极限,其预测允许定义可接受的工作极限和/或设计最佳分辨率和灵敏度的特性。研究了共振传感器的两种高温应用。选择氧化铈进行氧气分压监测,该膜代表了在吸收或解吸气态物质后会改变质量的薄膜。选择碳酸钡薄膜来检测NO 2,它代表了与气相反应形成新产物相时质量发生变化的薄膜。两种传感器均显示出对各自目标化学物质的敏感性,并证明了高温传感器应用的可行性。讨论了每个传感器的性能,并提出了改善传感器性能的建议。

著录项

  • 作者

    Seh Huankiat 1974-;

  • 作者单位
  • 年度 2005
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  • 原文格式 PDF
  • 正文语种 en_US
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