This work presents an application where Templated Assembly by Selective Removal (TASR) was used to assemble spherical components of two different sizes onto a common substrate according to a specific layout. TASR is a potential rapid, cost effective, and large scale parallel nanomanufacturing method. It consists of patterning a template into shapes complementary to the components to be assembled, and then using adhesion and fluid flow to selectively keep the components in certain locations on the substrate and remove them from all other locations. Adhesion is induced by growing self assembled monolayers (SAMs) on the components and template which are then placed in an assembly mixture of water and acetone. Fluid flow is induced by subjecting the assembly mixture to an acoustic wave generated by an ultrasonic transducer. Assembly is achieved only in the sites which match the shapes of the components, where retention due to adhesion dominates over removal due to fluid flow. The thesis presents an experiment in which TASR is used to assemble 636 nm and 2 glm diameter silica spheres on a silicon oxide layer grown and patterned on a silicon substrate. The SAM precursor used is OTC.
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