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Process and design techniques for low loss integrated silicon photonics

机译：低损耗集成硅光子学的工艺和设计技术

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Sparacin Daniel Knight;
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年度 2006
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1. Low-loss, silicon integrated, aluminum nitride photonic circuits and their use for electro-optic signal processing [J] . Xiong C., Pernice W.H.P., Tang H.X. Nano letters . 2012,第7期

机译：低损耗，集成硅的氮化铝光子电路及其在电光信号处理中的用途
2. Monolithically integrated low-loss three-dimensional spot-size converter and silicon photonic waveguides constructed by nanotuned Bosch process and oxidation [J] . Ling-Han Li, Akio Higo, Masakazu Sugiyama, Journal of microanolithography, MEMS, and MOEMS . 2011,第2期

机译：纳米调谐博世过程和氧化技术构建的单片集成低损耗三维点尺寸转换器和硅光子波导
3. Monolithically integrated low-loss three-dimensional spot-size converter and silicon photonic waveguides constructed by nanotuned Bosch process and oxidation [J] . Ling-Han Li Akio Higo Masakazu Sugiyama and Yoshiaki Nakano Journal of Micro/Nanolithography,MEMS,and MOEMS . 2011,第2期

机译：纳米调谐博世过程和氧化技术构建的单片集成低损耗三维点尺寸转换器和硅光子波导
4. A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated Photonics with Low Loss and Low Process Induced Phase Variation [C] . Sandeep S. Saseendran, Tangla D. Kongnyuy, Bruno Figeys, Optical Fiber Communications Conference and Exhibition . 2019

机译：一个300mm CMOS兼容的PECVD氮化硅平台，用于集成光子，具有低损耗和低工艺引起的相变
5. Low dispersion, high spectral efficiency, RF photonic transmission systems and low loss grating couplers for silicon -on -insulator nanophotonic integrated circuits. [D] . Narasimha, Adithyaram. 2004

机译：低色散，高光谱效率，RF光子传输系统和低损耗光栅耦合器，用于绝缘体上硅纳米光子集成电路。
6. Low-Loss Photonic Reservoir Computing with Multimode Photonic Integrated Circuits [O] . Andrew Katumba, Jelle Heyvaert, Bendix Schneider, -1

机译：采用多模光子集成电路的低损耗光子储层计算
7. Low-loss, silicon integrated, aluminum nitride photonic circuits and their use for electro-optic signal processing [O] . Xiong, Chi, Pernice, Wolfram H. P., Tang, Hong X. 2014

机译：低损耗，硅集成，氮化铝光子电路和它们用于电光信号处理

Process and design techniques for low loss integrated silicon photonics

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